Comparison of radio frequency and pulsed-d.c. plasma CVD of TiCNH and ZrCNH layers at low temperature

Plasma-CVD of TiCN and ZrCN films on light metals

K.‐T. Rie, J. Wöhle · Surface and Coatings Technology · 1999 · 87 citations

Natural Sciences, Materials Engineering, Materials Science +14

Plasma assisted CVD for low temperature coatings to improve the wear and corrosion resistance

K.‐T. Rie, A. Gebauer, J. Wöhle · Surface and Coatings Technology · 1996 · 59 citations

Engineering, Materials Engineering, Materials Science +14

Thin zirconium nitride films prepared by plasma-enhanced CVD

H Wendel, Harald Suhr · Applied Physics A · 1992 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +14

Zirconium carbonitride films produced by plasma-assisted metal organic chemical vapour deposition

H. Berndt, Aibin Zeng, H.‐R. Stock et al. · Surface and Coatings Technology · 1995 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +12

Plasma-assisted chemical vapour deposition with titanium amides as precursors

H.‐R. Stock, H. Berndt, Peter Mayr · Surface and Coatings Technology · 1991 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +14