Plasma-CVD of TiCN and ZrCN films on light metals - Concepedia

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Plasma-CVD of TiCN and ZrCN films on light metals

87

Citations

9

References

1999

Year

K.‐T. Rie, J. Wöhle

Surface and Coatings Technology

Materials ScienceEngineeringApplied PhysicsZrcn FilmsThin FilmsChemical Vapor DepositionPlasma Processing

References

	Year	Citations

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