Publication | Closed Access
Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching
26
Citations
26
References
2010
Year
Materials ScienceEngineeringBeam LithographyMicrofabricationNanotechnologyNanomaterialsSurface ScienceApplied PhysicsFabrication TechniqueSic NanopillarsPlasma EtchingIcp-rie Dry EtchingNanolithography Method
| Year | Citations | |
|---|---|---|
Page 1
Page 1