Publication | Open Access
Epitaxial GaN1−yAsy layers with high As content grown by metalorganic vapor phase epitaxy and their band gap energy
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Citations
6
References
2004
Year
Materials ScienceWide-bandgap SemiconductorEpitaxial GrowthEngineeringOptical PropertiesX-ray DiffractionApplied PhysicsEpitaxial Gan1−yasy LayersAs ContentGan Power DeviceBand Gap EnergyWide-bandgap SemiconductorsMolecular Beam EpitaxyCategoryiii-v SemiconductorBand Gap
GaN 1−y As y epitaxial alloy samples with [N]≫[As] were grown by metalorganic vapor phase epitaxy. The range of As content achieved, up to y=0.067, greatly extends the range of achievable As levels to values that are well within the miscibility gap of the GaN–GaAs system. The single-phase epitaxial nature of the alloy samples was confirmed by x-ray diffraction. The As-content dependence of the band gap was determined by optical absorption measurements. A highly-bowed bandgap was observed as a function of the As content, and a refined value of the bowing parameter of 16.9±1.1 eV was determined.
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