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Atomic layer deposition for the fabrication of 3D photonic crystals structures: Growth of Al2O3 and VO2 photonic crystal systems

DOI

33

Citations

28

References

2007

Year

Ian M. Povey, Maria Bardosova, Francis Chalvet, Martyn E. Pemble, Heather M. Yates
Surface and Coatings Technology

References

YearCitations

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