Silicon doping using disilane in low-pressure OMVPE of GaAs

Electron Transport in GaAs

D. L. Rode, Stephen Knight · Physical review. B, Solid state · 1971 · 252 citations

Semiconductors, Wide-bandgap Semiconductor, Electrical Engineering +14

The pyrolysis of monosilane

J. H. Purnell, Robin Walsh · Proceedings of the Royal Society of London A Mathematical and Physical Sciences · 1966 · 182 citations

A study of the growth mechanism of epitaxial GaAs as grown by the technique of metal organic vapour phase epitaxy

Maarten Leys, Hendrik Veenvliet · Journal of Crystal Growth · 1981 · 170 citations

Materials Engineering, Electrical Engineering, Engineering +7

Kinetics of Silicon Growth under Low Hydrogen Pressure

M. Jean‐Pascal Duchemin, Muriel Bonnet, Magali Koelsch · Journal of The Electrochemical Society · 1978 · 127 citations

Engineering, Silicon Deposition, Chemical Deposition +16

Silicon and germanium doping of epitaxial gallium arsenide grown by the trimethylgallium-arsine method

S. J. Bass · Journal of Crystal Growth · 1979 · 122 citations

Electrical Engineering, Epitaxial Growth, Engineering +8