Influence of AlN buffer layer thickness and deposition methods on GaN epitaxial growth - Concepedia

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Influence of AlN buffer layer thickness and deposition methods on GaN epitaxial growth

23

Citations

13

References

2009

Year

Jie Yang, Sang-Ki Kang, Duc V. Dinh, Dong‐Soo Yoon

Thin Solid Films

Materials EngineeringLayer ThicknessElectrical EngineeringGan Epitaxial GrowthEngineeringAluminium NitrideApplied PhysicsDeposition MethodsAluminum Gallium NitrideGan Power DeviceEpitaxial Growth

References

	Year	Citations

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