Bragg Diffraction of X-Rays by Single Crystals with Large Microdefects

Abstract

The generalized dynamical theory of X-ray scattering by single crystals containing randomly distributed microdefects has been applied to characterize structural imperfections in the Czochralski-grown dislocation-free silicon sample annealed at 1080 °C during 6 h. Measurements of rocking curves for 111 and 333 reflections of CuKα1 radiation have been performed by the high-resolution double-crystal diffractometer. The sizes and concentrations of oxygen precipitates and dislocation loops, which have been determined by independent fitting of the two rocking curves, are in good agreement confirming the validity of the developed theory.