Thin Solid Films · 1981 · 22 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceInterface ScienceSurface ChemistrySurface SciencePlasma Surface TreatmentPlasma-surface InteractionsSurface ModificationSurface PassivationSurface PhysicsSurface TreatmentAtmospheric Pressure Plasma TreatmentPlasma TreatmentPlasma-assisted BondingPlasma-induced Surface DamagePlasma-surface Reactions
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Microstructure of plasma-deposited a-Si : H films
J. C. Knights, R. Lujan · Applied Physics Letters · 1979 · 292 citations
David Clark, Tomasz Fok, G.G. Roberts et al. · Thin Solid Films · 1980 · 145 citations