Large area nanopatterning by combined anodic aluminum oxide and soft UV–NIL technologies for applications in biology

Frédéric Hamouda, H. Sahaf, Sylvain Held, Grégory Barbillon, Philippe Gogol, Eric Moyen, A. Aassime, Julien Moreau, Michael Canva, Jean–Michel Lourtioz,

Microelectronic Engineering · 2011 · 27 citations · 14 references

Concepts

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