Publication | Closed Access
Extraction Current Transients: New Method of Study of Charge Transport in Microcrystalline Silicon
430
Citations
2
References
2000
Year
EngineeringBiomedical EngineeringSilicon On InsulatorCharge TransportSemiconductor DeviceTransport PhenomenaMicrocrystalline SiliconCharge Carrier TransportNew MethodMaterials ScienceMaterials EngineeringElectrical EngineeringSemiconductor Device FabricationExtraction Current TransientsMicroelectronicsSilicon DebuggingDiffusion ResistanceMicrofabricationApplied PhysicsAmorphous SolidSimple Theory
The transport properties of microcrystalline silicon, namely, mobility and conductivity, are investigated by a new method, for which the simple theory as well as numerical modeling is presented. The basic idea of the new method is verified on amorphous hydrogenated silicon by comparison with the widely used time-of-flight method. Contrary to time of flight, the new method can be used even for relatively conductive materials. Preliminary results on microcrystalline silicon clearly indicate the critical role of amorphouslike tissue in transport in microcrystalline silicon.
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