Publication | Closed Access
Effect of crystallographic directions on porous silicon formation on patterned substrates
30
Citations
6
References
2000
Year
Materials ScienceEngineeringNanoporous MaterialMicrofabricationSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorCrystallographic DirectionsNanolithography MethodPorous Silicon Formation
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