Sensors and Actuators A Physical · 1995 · 19 citations · 3 references
EngineeringElectrical EngineeringMechanical EngineeringFinite Element AnalysisFinite Element MethodsSensorsCapacitive SensingDevice ModelingDisplacement SensorsFinite Element FormulationMems ModelingTactile SensingCapacitive Position SensingCapacitive Sensor ModelingCapacitive SensorsFinite Element ModelingPosition Sensors
3