Concepedia

Publication | Closed Access

Ion-implanted resist removal using atomic hydrogen

DOI

10

Citations

12

References

2011

Year

Hideo Horibe, Masashi Yamamoto, Takeshi Maruoka, Yousuke Goto, Akihiko Kono, Itsuo Nishiyama, Seiichi Tagawa
Thin Solid Films

References

YearCitations

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