Publication | Open Access
Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3
21
Citations
28
References
2015
Year
Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsOzone ConcentrationSemiconductor Device FabricationVacuum DeviceSilicon Surface PassivationAtomic LayerChemical Vapor DepositionSilicon On Insulator
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