Publication | Closed Access
Mesa structure formation using potassium hydroxide and ethylene diamine based etchants
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Citations
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References
2003
Year
Unknown Venue
Materials EngineeringInorganic ChemistryMaterials ScienceChemical EngineeringEngineeringMicromachinesInorganic MaterialMicrofabricationSurface ScienceEthylene Diamine-pyrocatecholComparative StudyPlasma EtchingChemistryPotassium HydroxideMicroelectronicsEthylene DiamineCrystallographyMesa Structure Formation
A comparative study was done between ethylene diamine-pyrocatechol (EDP) and potassium hydroxide (KOH) etching systems for micromachining mesas in
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