Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 38 citations · 11 references
Resonant OscillationsEngineeringTunable Micromechanical ResonatorsOscillatorsMicrofabricationMechanicsMicromachinesMechanical EngineeringMechanical SystemsActuationMicroactuatorMicro-electromechanical SystemMicromechanical OscillatorsVibration ControlResonant FrequencyNonlinear Vibration
We present actuators which tune the resonant frequency of micromechanical oscillators. Experimental results show resonant oscillations from 7.7% to 146% of the original resonant frequency. Numerical results substantiate these results. Two failure modes have been identified which limit
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Laterally driven polysilicon resonant microstructures
William C. Tang, T.-C.H. Nguyen, Roger T. Howe · 2003 · 382 citations
Microelectromechanical filters for signal processing
Liwei Lin, Clark T.‐C. Nguyen, Roger T. Howe et al. · 1992 · 259 citations
Electrical Engineering, Engineering, Lateral Microresonators +14