Tele-touch feedback of surfaces at the micro/nano scale: modeling and experiments

Abstract

In this paper, a teleoperated micro/nano scale touching system is proposed, and micro/nano contact mechanics models are introduced. Using a 1-DOF haptic device, force-reflecting servo type scaled teleoperation controller, and atomic force microscopy cantilever tip, touching experiments and virtual reality simulator for micro/nano-touch are realized. Scaling issue of the micro/nano forces and positions is discussed and possible solutions are proposed. For the first time upon our knowledge, such issue is discussed with nano scale experimental results. Experimental results show that micro/nano contact force feedback can be held for flat surfaces with the proposed system.