Concepedia
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 40 citations · 2 references
EngineeringMechanical EngineeringMechatronics EngineeringInstrumentationMicroelectromechanical SystemsSensorsMechanical SensorsMems DesignMems SensorsMicroelectromechanical SensorsMicromachiningVibration MeasurementAccelerometersAccelerometryInertial Measurement Units
2
The effect of thermoelastic internal friction on the Q of micromachined silicon resonators
T.V. Roszhart · 1990 · 152 citations
Engineering, Materials Science, Mechanical Engineering +17
A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers
Howard K. Rockstad, Thomas W. Kenny, J. K. Reynolds et al. · Sensors and Actuators A Physical · 1994 · 41 citations
Engineering, Electrical Engineering, Mechanical Engineering +14