Publication | Closed Access
Dip pen nanolithography-deposited zinc oxide nanorods on a CMOS MEMS platform for ethanol sensing
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Citations
40
References
2015
Year
Materials ScienceElectrical EngineeringDip Pen NanolithographyEngineeringCmos MemsMicrofabricationNanotechnologyNanomaterialsNano Electro Mechanical SystemNanometrologyNanofabricationNanosensorMicro-electromechanical SystemCmos Mems PlatformNanolithography MethodEthanol SensingLow Cost
Zinc oxide nanorods integration with CMOS MEMS substrate using dip pen nanolithography for low cost, low power ethanol sensor development.
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