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Effects of the deposition condition on the microstructure and properties of ZnO thin films deposited by metal organic chemical vapor deposition with ultrasonic nebulization

Materials ScienceEngineeringOxide ElectronicsApplied PhysicsUltrasonic NebulizationThin FilmsChemical DepositionDeposition ConditionChemical Vapor DepositionZno Thin FilmsThin Film Processing