Concepedia

Publication | Closed Access

Defect evolution and dopant activation in laser annealed Si and Ge

DOI

42

Citations

39

References

2015

Year

F. Cristiano, Mohammad Reza Shayesteh, Ray Duffy, Karim Huet, Fulvio Mazzamuto, Yang Qiu, M. Quillec, Henrik H. Henrichsen, Peter F. Nielsen, Dirch Hjorth Petersen,
Materials Science in Semiconductor Processing

References

YearCitations

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