2015 · 17 citations · 3 references
Minimal RealizationEngineeringAerospace EngineeringNew TypeMems RateMechanical EngineeringMechatronicsMechanical SystemsGyroscopeEducationProof MassesKinematicsInstrumentationDual Foucault PendulumInclinometerVibration ControlMicro-electromechanical System
We report a new type of MEMS rate integrating gyroscope. The Dual Foucault Pendulum (DFP) gyroscope consists of two dynamically equivalent, mechanically coupled proof masses, oscillating in anti-phase motion, creating a dynamically balanced resonator with x-y symmetry in frequency and damping. Phase synchronization is established by mechanical coupling of the two proof masses, whereas quadrature suppression is achieved by four differential shuttle pairs placed in-between. Dual axis tuning fork behavior provides vibration immunity and anchor loss mitigation, resulting in a Qfactor over 100,000 on both modes at a center frequency of 2.7 kHz. Whole angle mechanization is demonstrated by FPGAbased closed loop control of the gyroscope, showing a scale factor variation of 22 ppm RMS over 2 hours of measurement. We believe Dual Foucault Pendulum is the minimal realization of a dynamically balanced lumped mass whole angle (WA) gyroscope.
3
A micromachined comb-drive tuning fork rate gyroscope
Jonathan Bernstein, S. Cho, A. Thomas King et al. · 2002 · 281 citations
High Performance Matched-Mode Tuning Fork Gyroscope
Mohammed Fayyad Zaman, Ajit Sharma, Farrokh Ayazi · 2006 · 108 citations
Engineering, Measurement, Education +16