Epitaxially grown WOx nanorod probes for sub-100nm multiple-scanning-probe measurement

Abstract

Tungsten suboxide (WOx) nanorods that are directly grown on electrochemically etched tungsten (W) tips are used as probes of a double-scanning-probe tunneling microscope. A WOx nanorod well acts as a scanning probe in tunneling microscopy and stable atomic-scale imaging is confirmed. For a contact nanoelectrode in measuring electrical properties of nanostructures, the WOx nanorod probe is coated with platinum. A series of resistance measurements of an erbium-disilicide nanowire as a function of interprobe distance down to 72nm is realized.