2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) · 2003 · 59 citations · 3 references
EngineeringElectrical EngineeringAnalog ElectronicsMicroelectromechanical SystemsMicroelectronicsCmos Circuit DesignInstrumentation AmplifiersLow-noise Circuit DesignMems DesignMicroelectromechanical SensorsSensor NoiseAccelerometersCapacitive Readout CircuitsChopper-stabilized AmplifiersCmos Analog Integrated CircuitsMems Capacitive AccelerometersNoise FloorOffset CancellationOffset Compensation
A CMOS chopper-stabilized amplifier with both DC and AC offset cancellation, for capacitive readout of motion in MEMS structures, achieves 40 nV//spl radic/HZ noise floor, 10 mV DC offset, and 40 dB sensor offset reduction. The amplifier, integrated into a CMOS-MEMS accelerometer, achieves 50 /spl mu/g//spl radic/Hz noise floor.
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A lateral capacitive CMOS accelerometer with structural curl compensation
Gang Zhang, Huikai Xie, Lauren E. de Rosset et al. · 1999 · 66 citations