Neural network control of a piezo tool positioner

Jianwei Xu

2002 · 27 citations · 0 references

Concepts

Abstract

The major technical challenge to the application of piezo crystal as an actuator is concerned with its hysteresis behavior. This would result in a nonlinear and multi-valued mapping between the actuator input and output and hence influence the desired control precision. This problem was solved by using closed-loop robust neural network control technology.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>