Demonstration of p-type In<inf>0.7</inf>Ga<inf>0.3</inf>As/GaAs<inf>0.35</inf>Sb<inf>0.65</inf> and n-type GaAs<inf>0.4</inf>Sb<inf>0.6</inf>/In<inf>0.65</inf>Ga<inf>0.35</inf>As complimentary Heterojunction Vertical Tunnel FETs for ultra-low power logic

Abstract

Extremely scaled high-k gate dielectrics with high quality electrical interfaces with arsenide (As) and antimonide (Sb) channels are used to demonstrate complimentary ‘all III–V’ Heterojunction Vertical Tunnel FET (HVTFET) with record performance at |V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS</inf> |=0.5V. The p-type TFET (PTFET) has I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</inf> =30µA/µm and I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</inf> /I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">OFF</inf> =10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> , whereas the n-type TFET (NTFET) has I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</inf> =275µA/µm and I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</inf> /I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">OFF</inf> =3×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sup> , respectively. NTFET shows 55mV/decade switching slope (SS) while PTFET shows 115mV/decade SS in pulsed mode measurement. Vertical TFET offers 77% higher effective drive strength than Si-FinFET for given inverter standard cell area. Energy-delay performance of TFET shows gain over CMOS for low V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DD</inf> logic applications.