2002 · 12 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSensorsThin FilmsChemical Vapor DepositionGas SensorsGelsOptical SensorsOptical Thin FilmsOzone ChemistryAnnealingOzoneSol-gel Derived Sensor MaterialsSol-gel MaterialsSol-gel ProcessingSol-gel SystemsSol-gel Thin FilmsThin Oxide Films
Novel ozone sensors based on In/sub 2/O/sub 3/ thin films on sapphire substrates with interdigitated comb structures have been prepared from indium isopropoxide solutions by the sol-gel process. Highly sensitive films have been obtained by using aged solutions. The annealing temperature was 500/spl deg/C. Compared with earlier thin film devices, the advantages of these sensors include significantly higher ozone sensitivity (as large as 6 at 45 ppb), lower working temperature (below 200/spl deg/C) and low production cost.
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Tadashi Takada, Kengo Suzuki, Masanori NAKANE · Sensors and Actuators B Chemical · 1993 · 156 citations
Sol-gel prepared In/sub 2/O/sub 3/ thin films for ozone sensing
W. Włodarski, Hongtao Sun, Aleksander Gurlo et al. · 2002 · 12 citations
Natural Sciences, Materials Engineering, Materials Science +17