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Nanowatt logic using field-effect metal-oxide semiconductor triodes
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1963
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Materials ScienceElectrical EngineeringEngineeringNanoelectronicsNanotechnologyOxide ElectronicsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationMicroelectronicsCompound SemiconductorPlanar Diffusion ProcessSemiconductor Device
COMPLEMENTARY N AND P-type field-effect metal-oxide-semiconductor-triodes have been fabricated from silicon. By a planar diffusion process.