Design and synthesis of an optimum performance crosslinking resist based on poly (2,4-dimethylstyrene)

Polymers: chemistry and physics of modern materials

J. M. G. Cowie · Choice Reviews Online · 2008 · 710 citations

Natural Sciences, Chemistry, Materials Science +17

Gel Formation in Polymers Resulting from Simultaneous Crosslinking and Scission

Mitio Inokuti · The Journal of Chemical Physics · 1963 · 132 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Chloromethylated Polystyrene as a Dry Etching‐Resistant Negative Resist for Submicron Technology

Saburo Imamura · Journal of The Electrochemical Society · 1979 · 79 citations

Natural Sciences, Materials Engineering, Materials Science +10

Analysis of Molecular Weight Changes and Gel Data of Some Irradiated Vinyl Polymers

Mitio Inokuti, Malcolm Dole · The Journal of Chemical Physics · 1963 · 33 citations

Natural Sciences, Chemistry, Materials Science +17

An investigation of the lithographic properties of the poly (<i>p</i>-methylstyrene-co-chloromethylstyrene) resist system

A. Ledwith, Mya G. Mills, P. Hendy et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +11