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Fabrication and reliability study of a double spiral platinum-based MEMS hotplate
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2015
Year
A Platinum ResistorReliability StudyEngineeringMechanical EngineeringMicro-electromechanical SystemMems-cad Tool CoventorwarePulse PowerElectronic PackagingMaterials EngineeringMaterials ScienceElectrical EngineeringHeat TransferMicroelectronics3D PrintingMicrostructureHigh Temperature MaterialsMicrofabricationMems Hotplate ConsistingThermal Engineering
A MEMS hotplate consisting of a double spiral platinum-based element was designed and simulated using MEMS-CAD tool COVENTORWARE. A platinum resistor of 115 Ω was fabricated on a 0.6 μm-thickSiO2 membrane of size 120 μm×120 μm. The hotplate consumes 54 mW when heated up to 756°C. The temperature coefficient of resistance of platinum was measured and found to be 2.19×10−3/°C. The fabrication and reliability testing of the hotplate are described. The test results show that the hotplate can continuously operate at 580°C for 5.5 h and it can sustain at least 60 cycles of pulse-mode operation at 530°C with very low temperature and resistance drifts. The maximum current capability of the hotplate was found to be 13.4 mA without any damage to the structure.