Silicon on thin BOX: a new paradigm of the CMOSFET for low-power and high-performance application featuring wide-range back-bias control

Abstract

We demonstrate a new MOSFET on ultra-thin BOX that allows wide-range back-bias control in low-power and high-performance applications. The back gate is effective not only to increase the drive current by about 20% in active mode but also in reduce the off-current by an order of magnitude in stand-by mode. We have also demonstrated tunable-threshold-voltage technology for devices with metal gates and ion implantation for V/sub th/ control. The target V/sub th/ for low-power applications was achieved by using ion implantation for V/sub th/ control. We propose a 6-transistor SRAM memory cell in which we obtain even more benefit from the new device structure by adding a feedback mechanism. A proposed 6-Tr SRAM memory cell is shown to dramatically improve SNM characteristics at the 65-nm technology nodes, and this effect will also apply at finer nodes.