EngineeringMechanical EngineeringSystems EngineeringMicroelectromechanical SystemsModel-based Systems EngineeringSystems ModelingMems DesignMems ModelingMems SimulationSystem InterfacingHierarchical PartitioningMicromechanical ModelingPartitioningReference Frame DefinitionReference Frame Selection
AHDL modeling of MEMS components for system simulation is slowly maturing, however many issues remain regarding interoperability and composability. A discussion of MEMS natures, hierarchy and model partitioning helps to introduce the issues. Specific conventions for interoperability include choice of component reference frame and associated reference directions. A composite discipline extension to AHDLs is proposed to enable a single-port representation of micromechanical connection points in 2D and 3D space.
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Addressing the needs of complex MEMS design
J V Clark, David Bindel, W. F. Kao et al. · 2003 · 39 citations
Engineering, Mechanical Engineering, Systems Engineering +13
Modeling and Simulation for Design of Suspended MEMS
Qi Jing · 2003 · 24 citations
Engineering, Electrical Engineering, Mechanical Engineering +17