Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 11 citations · 2 references
ArchitectureDesignSystems EngineeringDesign AutomationMicroelectromechanical SystemsSimulation-based DesignDesign ProcessDesign SimulationDesign Space ExplorationMems DesignMems SimulationModel-based DesignAutomated Design Space ExplorationComputational Design ExplorationComputer-aided Design AutomationDesign Automation For FabricationDesign For CustomizationDesign Process ModelingModel-based Design Exploration
As MOEMS (Micro-Opto-Electro-Mechanical Systems) transition from laboratory curiosities to production products inserted into telecommunication systems, a top down design flow is necessary to minimize time-to-market. We present a structured- custom approach for MOEMS design based on the concept of using parameterized behavioral models as a means to improve and speed up the design process. This approach enables a user to quickly explore a larger design space on the interaction of the behavioral models with their surrounding system. Once the simulation is completed to the designer's satisfaction, a device layout can be output for FEM verification on critical areas or to generate the masks for fabrication.
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