2003 · 13 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsElectronic MaterialsThin FilmsElectrode MaterialsFatiguePiezoelectric CeramicsPiezoelectric MaterialsThin Film Electrical PropertiesThin Film Mechanical PropertiesFatigue BehaviorFatigue MechanismsHysteresisLead Zirconate TitanatePolycrystalline MaterialsSol-gel MaterialsSol-gel ProcessingSol-gel Thin Films
Thin films of lead zirconate titanate (PZT) were deposited on a variety of substrates using the sol-gel process. These included Pt/Ti/SiO/sub 2//Si, RuO/sub 2//SiO/sub 2//Si, RuO/sub 2//MgO, Pt/MgO, and Pt/Ti/MgO. Epitaxial, oriented, and polycrystalline films were obtained after annealing at 700 degrees C for 10 min. Polycrystalline PZT films with RuO/sub 2/ as top and bottom electrodes showed superior hysteresis and fatigue behavior as compared to such films on Pt. Epitaxial films on Pt/MgO and Pt/Ti/MgO displayed excellent fatigue behavior and large remnant polarization as compared to their polycrystalline counterparts on Pt/Ti/SiO/sub 2//Si. The results suggest that different fatigue mechanisms may be simultaneously operating.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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Carlos A. Paz de Araújo, L. D. McMillan, B. M. Melnick et al. · Ferroelectrics · 1990 · 249 citations
Natural Sciences, Electrical Engineering, Materials Science +17