Publication | Open Access
Multilayer atom chips for versatile atom micromanipulation
47
Citations
15
References
2008
Year
EngineeringElectron-beam LithographyVersatile Atom MicromanipulationIntegrated CircuitsSubmicron WireBeam LithographyMaterials FabricationUltracold AtomNanometrologyQuantum MatterAtom ChipNanolithography MethodMaterials ScienceQuantum SciencePhysicsNanotechnologyQuantum DeviceAtomic PhysicsMicroelectronicsMicrofabricationNanomaterialsNatural SciencesApplied PhysicsQuantum DevicesNanofabricationNanostructures
We employ a combination of optical and electron-beam lithography to create an atom chip combining submicron wire structures with larger conventional wires on a single substrate. The multilayer fabrication enables crossed wire configurations, greatly enhancing the flexibility in designing potentials for ultracold quantum gases and Bose–Einstein condensates. Large current densities of >6×107A∕cm2 and high voltages of up to 65V across 0.3μm gaps are supported by even the smallest wire structures. We experimentally demonstrate the flexibility of the next generation atom chip by producing Bose–Einstein condensates in magnetic traps created by a combination of wires involving all different fabrication methods and structure sizes.
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