European Solid-State Circuits Conference · 1981 · 21 citations · 0 references
EngineeringComputer EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesVlsi DesignCmos Circuit DesignDigital Logic DesignHigh-frequency Semiconductor DevicesIntegrated Circuit DesignRadio-frequency Integrated CircuitsTiming AnalysisCmos Fabrication ProcessesCmos Logic CircuitsCmos Logic DesignDigital Logic CircuitsOscillator CircuitsPower-delay ProductReactive Ion EtchingX-ray Lithography
Logic circuits made with a new scaled n-channel MOSFET technology have been clocked at gigabit rates. This new nMOS technology employs X-ray lithography and reactive ion etching to obtain 1 ?m features and submicron channel lengths. Two ring oscillator designs are presentea: (1) circuits witra propagation aelays of 30 ps and power-delay products of 44 fJ and (2) circuits with power-delay proaucts of 5 fJ that have propagation delays of 75 ps. A practical logic circuit, a four-stage frequency divider or counter, is aescribed that has been operated at clock frequencies up to 2.5 GHz.