Atomic-step observation at buried SiO2Si(111) interfaces by scanning reflection electron microscopy - Concepedia

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Atomic-step observation at buried SiO2Si(111) interfaces by scanning reflection electron microscopy

44

Citations

17

References

1997

Year

Heiji Watanabe, Ken Fujita, Masakazu Ichikawa

Surface Science

Surface CharacterizationAtomic-step ObservationEngineeringPhysicsReflection Electron MicroscopySurface AnalysisSurface ScienceApplied PhysicsSilicon On InsulatorInterface Structure

References

	Year	Citations

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