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GaAsP on SiGe/Si material quality improvements with in-situ stress sensor and resulting tandem device performance

Electrical EngineeringSemiconductor DeviceEngineeringTandem Device PerformanceSilicon On InsulatorApplied PhysicsSemiconductor Device FabricationElectronic PackagingInstrumentationMicroelectronicsOptoelectronicsCompound SemiconductorIn-situ Stress Sensor