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73
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1.7K
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Woburn, United States
73
Layout decomposition for double patterning lithography
Andrew B. Kahng, Chul‐Hong Park, Xu Xu et al. · 2008 · 91 citations
Modeling of non-uniform device geometries for post-lithography circuit analysis
Puneet Gupta, Andrew B. Kahng, Young‐Min Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 47 citations
Engineering, Computer Engineering, Electrical Engineering +17
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