InSituTec (United States)

Development of a virtual probe tip with an application to high aspect ratio microscale features

Marcin B. Bauza, R.J. Hocken, Stuart T. Smith et al. · Review of Scientific Instruments · 2005 · 73 citations

Engineering, Manufacturing Engineering, Instrumentation +16

Design and performance of a dual drive system for tip-tilt angular control of a 300mm diameter mirror

Shane C. Woody, Stuart T. Smith · Mechatronics · 2006 · 42 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +14

Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

Xiangzhi Yu, Steven R. Gillmer, Shane C. Woody et al. · Review of Scientific Instruments · 2016 · 40 citations

Engineering, Systems Engineering, Instrumentation +16

Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration

Steven R. Gillmer, Richard C. Smith, Shane C. Woody et al. · Measurement Science and Technology · 2014 · 38 citations

Engineering, Mechatronics Engineering, Metrology +16

Surface profilometry of high aspect ratio features

Marcin B. Bauza, Shane C. Woody, B. Woody et al. · Wear · 2010 · 35 citations

Engineering, Computer Science, Geometry +13