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King of Prussia, United States
375
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1–5 of 27
Future of plasma etching for microelectronics: Challenges and opportunities
G. S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2024 · 145 citations · Full text
Engineering, Electrical Engineering, Manufacturing Engineering +15
Jian‐Min Zuo, Tai‐Shung Chung, Gregory S. O’Brien et al. · Journal of Membrane Science · 2016 · 130 citations
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