Ultraclean technology is the academic field and methodological approach dedicated to developing and implementing advanced processes and systems for achieving exceptionally high levels of purity and minimizing particulate, chemical, and biological contamination, particularly critical in sensitive industrial and scientific applications where trace impurities significantly impact performance or yield.
10
Publications
419
Citations
15
Authors
8
Institutions
Publications per year
2017–2026
1
Parents
Publications
10
ULSI reliability through ultraclean processing
T. Ohmi · Proceedings of the IEEE · 1993 · 46 citations
Engineering, Ultraclean Processing, Ultraclean Technology +16
Future trends and applications of ultra-clean technology
T. Ohmi · 2003 · 29 citations
Engineering, Ultraclean Technology, Wafer Scale Processing +20
The importance of research on the ultras: introduction
Mark Doidge, Martin Lieser · Sport in Society · 2017 · 29 citations · Full text
1–5 of 10
Authors
15
- TO
2
h-index
- TO
2
h-index
- JLJ. L. Gardon
1 publications · 10 citations
1
h-index
- SGS. G. Mason
1 publications · 10 citations
1
h-index
- TO
1
h-index
1–5 of 15
Institutions
8
Tohoku University
Sendai, Japan
4 h-index
4 publications
290 citations
New York State Energy Research and Development Authority
Albany, United States
1 h-index
1 publications
17 citations
University at Albany, State University of New York
Albany, United States
1 h-index
1 publications
17 citations
Center for Nanoscale Science and Technology
Gaithersburg, United States
1 h-index
2 publications
34 citations
Rochester Institute of Technology
Rochester, United States
1 h-index
5 publications
80 citations
University of California, Davis
Davis, United States
1 h-index
1 publications
10 citations
University of Vienna
Vienna, Austria
1 h-index
1 publications
29 citations
University of Brighton
Brighton, United Kingdom
1 h-index
1 publications
29 citations
1–8 of 8
Venues
- Nihon Kikai Gakkaishi/Journal of the Japan Society of Mechanical Engineers
1 publications · 47 citations
1
h-index
- Canadian Journal of Chemistry
1 publications · 10 citations
1
h-index
- Journal of The Electrochemical Society
JES · 1 publications · 189 citations
1
h-index
- Japanese Journal of Applied Physics
JJAP · 1 publications · 26 citations
1
h-index
- Proceedings of the IEEE
1 publications · 46 citations
1
h-index
1–5