Outgassing Control

Outgassing Control is a materials management strategy in MEMS packaging that mitigates the release of trapped gases from packaging materials under vacuum or elevated temperature conditions to prevent contamination, pressure instability, and device degradation.

120

Publications

3.3K

Citations

456

Authors

179

Institutions

Publications per year

2017–2026

Parents

Mems Packaging

Publications

120

Reduction of stainless-steel outgassing in ultra-high vacuum

R. Calder · British Journal of Applied Physics · 1967 · 136 citations

Engineering, Materials Engineering, Metallurgy +7

Influence of spacecraft outgassing on the exploration of tenuous atmospheres with in situ mass spectrometry

Bernhard Schläppi, K. Altwegg, H. Balsiger et al. · Journal of Geophysical Research Atmospheres · 2010 · 128 citations · Full text

Natural Sciences, Astronomy, Chemistry +16

Decreasing surface outgassing by thin film getter coatings

C. Benvenuti, Paolo Chiggiato, Fabio Cicoira et al. · Vacuum · 1998 · 120 citations

Natural Sciences, Materials Engineering, Materials Science +14

CO2 outgassing and calcite precipitation in Falling Spring Creek, Virginia, U.S.A.

Janet S. Herman, Michelle M. Lorah · Chemical Geology · 1987 · 112 citations

Natural Sciences, Earth Sciences, Geology +10

350. Reduction of stainless steel outgassing in ultrahigh vacuum

Vacuum · 1968 · 98 citations

Engineering, Materials Engineering, Metallurgy +8

1–5 of 120

Authors

456

VN
Vincenc Nemanič
Jožef Stefan Institute, Slovenia
5 publications · 120 citations
5
h-index
HD
H.F. Dylla
Princeton Plasma Physics Laboratory, United States
3 publications · 115 citations
3
h-index
LN
L. N. Dinh
Lawrence Livermore National Laboratory, United States
3 publications · 67 citations
3
h-index
RN
Roman Nevshupa
Instituto de Ciencias de La Construcción Eduardo Torroja, Spain
3 publications · 69 citations
3
h-index
ST
S. Tsukahara
Electrotechnical Institute, Poland
3 publications · 46 citations
3
h-index

1–5 of 456

Institutions

179

1–8 of 179

Venues

Vacuum
25 publications · 816 citations
17
h-index
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
19 publications · 500 citations
14
h-index
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
6 publications · 118 citations
6
h-index
Journal of Photopolymer Science and Technology
4 publications · 75 citations
4
h-index
Review of Scientific Instruments
3 publications · 52 citations
3
h-index

1–5