Concepedia

Microheater-based Actuation

Microheater-Based Actuation is a thermal actuation method that utilizes embedded microscale resistive heaters to induce localized thermal expansion or phase change in a material, thereby generating mechanical displacement or force in microelectromechanical systems (MEMS).

38

Publications

1.6K

Citations

167

Authors

79

Institutions

Publications per year

2017–2026

9

Parents

Publications

38

Thermocapillary actuation of droplets on chemically patterned surfaces by programmable microheater arrays

Anton A. Darhuber, Joseph Valentino, Sandra M. Troian et al. · Journal of Microelectromechanical Systems · 2003 · 237 citations

, , +17

Micro combined heat and power (MCHP) technologies and applications

Maryam Mohammadi Maghanki, Barat Ghobadian, Gholamhassan Najafi et al. · Renewable and Sustainable Energy Reviews · 2013 · 164 citations

, , +10

Thermally mediated droplet formation in microchannels

Nam‐Trung Nguyen, Teck-Hui Ting, Teck Neng Wong et al. · Applied Physics Letters · 2007 · 132 citations · Full text

, , +16

A Single Cell Extraction Chip Using Vibration-Induced Whirling Flow and a Thermo-Responsive Gel Pattern

Takeshi Hayakawa, Shinya Sakuma, Takeshi Fukuhara et al. · Micromachines · 2014 · 67 citations · Full text

, , +16

Three-dimensional DSMC simulation of thermal Knudsen force in micro gas actuator for mass analysis of gas mixture

Zicheng Li, Amir Musa Abazari, M. Barzegar Gerdroodbary et al. · Measurement · 2020 · 65 citations

, , +17

1–5 of 38

Authors

167

  1. AA
    Anton A. Darhuber

    Eindhoven University of Technology, Netherlands

    2 publications · 284 citations

    2

    h-index

  2. GB
    G. Binnig

    IBM Research - Zurich, Switzerland

    2 publications · 57 citations

    2

    h-index

  3. KT
    Kenichi Takahata

    University of British Columbia, Canada

    2 publications · 49 citations

    2

    h-index

  4. AD
    Andreas Dietzel

    Technische Universität Braunschweig, Germany

    2 publications · 57 citations

    2

    h-index

  5. BL
    Bendong Liu

    Beijing University of Technology, China

    2 publications · 40 citations

    2

    h-index

1–5 of 167

Institutions

79

  1. IBM Research - Zurich

    Rüschlikon, Switzerland

    2 h-index

    10 publications

    285 citations

  2. The University of Tokyo

    Tokyo, Japan

    2 h-index

    6 publications

    132 citations

  3. Jiangsu University

    Zhenjiang, China

    2 h-index

    5 publications

    201 citations

  4. Beijing Health Vocational College

    Beijing, China

    2 h-index

    2 publications

    40 citations

  5. Seoul National University

    Seoul, South Korea

    2 h-index

    7 publications

    248 citations

  6. Beijing University of Technology

    Beijing, China

    2 h-index

    9 publications

    184 citations

  7. University of British Columbia

    Vancouver, Canada

    2 h-index

    7 publications

    180 citations

  8. Louisiana Tech University

    Ruston, United States

    2 h-index

    4 publications

    69 citations

1–8 of 79

Venues

  1. Sensors and Actuators A Physical

    6 publications · 159 citations

    6

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 3 publications · 91 citations

    3

    h-index

  3. Journal of Microelectromechanical Systems

    3 publications · 285 citations

    3

    h-index

  4. Lab on a Chip

    2 publications · 68 citations

    2

    h-index

  5. Microelectronic Engineering

    2 publications · 76 citations

    2

    h-index

1–5