Concepedia

High-throughput Metrology

High-Throughput Metrology is a metrological approach that enables the rapid and automated acquisition of measurement data from large numbers of microfabricated structures or devices, distinguished by its emphasis on scalability, speed, and statistical representativeness in the characterization of manufacturing processes.

17

Publications

961

Citations

108

Authors

36

Institutions

Publications per year

2017–2026

6

Parents

Publications

17

Advances in Large-Scale Metrology – Review and future trends

Robert Schmitt, Martin Peterek, Edward Morse et al. · CIRP Annals · 2016 · 253 citations

, , +13

Large-Scale Metrology – An Update

William T. Estler, K. L. Edmundson, G.N. Peggs et al. · CIRP Annals · 2002 · 242 citations

, , +9

Combinatorial and high-throughput measurements of the modulus of thin polymer films

Christopher M. Stafford, Shu Guo, Christopher Harrison et al. · Review of Scientific Instruments · 2005 · 147 citations

, , +17

Metrology applications using off-axis digital holography microscopy

Yves Emery, Tristan Colomb, Etienne Cuche · Journal of Physics Photonics · 2021 · 47 citations · Full text

, , +15

A high throughput instrument to measure mechanical losses in thin film coatings

G. Vajente, A. Ananyeva, G. Billingsley et al. · Review of Scientific Instruments · 2017 · 41 citations · Full text

, , +17

1–5 of 17

Authors

108

  1. WT
    William T. Estler

    National Institute of Standards and Technology, United States

    2 publications · 495 citations

    2

    h-index

  2. BB
    Benjamin Bunday

    National Institute of Standards and Technology, United States

    2 publications · 41 citations

    2

    h-index

  3. MP
    Martin Peterek

    RWTH Aachen University, Germany

    1 publications · 253 citations

    1

    h-index

  4. AV
    András Vládar

    National Institute of Standards and Technology, United States

    1 publications · 19 citations

    1

    h-index

  5. DG
    David G. Cahill

    University of Illinois Urbana-Champaign, United States

    1 publications · 31 citations

    1

    h-index

1–5 of 108

Institutions

36

  1. National Institute of Standards and Technology

    Gaithersburg, United States

    4 h-index

    9 publications

    1.1K citations

  2. Material Measurement Laboratory

    Gaithersburg, United States

    2 h-index

    5 publications

    104 citations

  3. ASML (Netherlands)

    Veldhoven, The Netherlands

    2 h-index

    15 publications

    260 citations

  4. SUNY Polytechnic Institute

    Utica, United States

    2 h-index

    2 publications

    41 citations

  5. National Physical Laboratory

    London, United Kingdom

    2 h-index

    3 publications

    748 citations

  6. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    2 h-index

    3 publications

    319 citations

  7. Schlumberger (Ireland)

    Dublin, Ireland

    1 h-index

    1 publications

    19 citations

  8. Newbury College

    Brookline, United States

    1 h-index

    1 publications

    22 citations

1–8 of 36

Venues

  1. 4

    h-index

  2. Review of Scientific Instruments

    2 publications · 188 citations

    2

    h-index

  3. CIRP Annals

    2 publications · 495 citations

    2

    h-index

  4. Measurement Science and Technology

    2 publications · 52 citations

    2

    h-index

  5. JOM

    1 publications · 31 citations

    1

    h-index

1–5