Creep Compensation

Creep Compensation is a control methodology designed to counteract the time-dependent displacement drift inherent in piezoelectric actuators, thereby enhancing positioning accuracy without feedback in precision motion systems.

Publications

5.9K

Citations

184

Authors

Institutions

Publications per year

2017–2026

Parents

Piezoelectric ActuationServo Actuators

Publications

Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

D. Croft, G. Shed, Santosh Devasia · Journal of Dynamic Systems Measurement and Control · 1999 · 714 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +15

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Guoying Gu, Chun‐Yi Su, Han Ding et al. · IEEE Transactions on Automation Science and Engineering · 2014 · 606 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators

Kam K. Leang, Santosh Devasia · IEEE Transactions on Control Systems Technology · 2007 · 375 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Feedforward control of piezoactuators in atomic force microscope systems

Kam K. Leang, Qingze Zou, Santosh Devasia · IEEE Control Systems · 2009 · 268 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Compensation of Scanner Creep and Hysteresis for AFM Nanomanipulation

Babak Mokaberi, Ari Requicha · IEEE Transactions on Automation Science and Engineering · 2008 · 198 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

1–5 of 82

Authors

184

MR
Micky Rakotondrabe
Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies, France
9 publications · 481 citations
9
h-index
PL
Philippe Lutz
Centre National de la Recherche Scientifique, France
7 publications · 408 citations
7
h-index
GG
Guoying Gu
Shanghai Jiao Tong University, China
6 publications · 980 citations
6
h-index
SD
Santosh Devasia
University of Washington, United States
5 publications · 1.5K citations
5
h-index
KK
Kam K. Leang
University of Utah, United States
4 publications · 741 citations
4
h-index

1–5 of 184

Institutions

1–8 of 84

Venues

IEEE/ASME Transactions on Mechatronics
6 publications · 358 citations
6
h-index
Review of Scientific Instruments
6 publications · 273 citations
6
h-index
IEEE Transactions on Automation Science and Engineering
5 publications · 1.1K citations
5
h-index
Sensors and Actuators A Physical
4 publications · 435 citations
4
h-index
Smart Materials and Structures
SMS · 4 publications · 185 citations
4
h-index

1–5