Progress in nanoscale dry processes for fabrication of high-aspect-ratio features: How can we control critical dimension uniformity at the bottom?

Kenji Ishikawa, Kazuhiro Karahashi, Tatsuo Ishijima, +6

Japanese Journal of Applied Physics

EngineeringTarget FabricationSoft MatterCritical Dimension UniformityDry Processes +21

Nonvolatile logic-in-memory array processor in 90nm MTJ/MOS achieving 75% leakage reduction using cycle-based power gating

Masanori Natsui, Daisuke Suzuki, Noboru Sakimura, +11

Hardware SecurityMtj-oriented Design FlowElectrical EngineeringNon-volatile MemoryEngineering +11

Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions?

Kenji Ishikawa, Kazuhiro Karahashi, Takanori Ichiki, +7

Japanese Journal of Applied Physics

EngineeringTwo-dimensional MaterialsChemistryDry ProcessesPlasma Processing +19

Etching Magnetic Tunnel Junction with Metal Etchers

Keizo Kinoshita, Hiroaki Utsumi, Katsumi Suemitsu, +2

Japanese Journal of Applied Physics

Materials ScienceSpintronicsMagnetismElectrical EngineeringEngineering +12

Electrical and optical properties of AgInS2

Kotaro Okamoto, Keizo Kinoshita

Solid-State Electronics

Ii-vi SemiconductorOptical MaterialsEngineeringOptical PropertiesSpectroscopy +6

Influence of CMP Chemicals on the Properties of Porous Silica Low-k Films

Akira Ishikawa, Yoshinori Shishida, T. Yamanishi, +7

Journal of The Electrochemical Society

EngineeringNanoporous MaterialPorous MembraneChemistryChemical Engineering +15

Reactive ion etching of Fe-Si-Al alloy for thin film head

Keizo Kinoshita, Kenneth M. Yamada, H. Matsutera

IEEE Transactions on Magnetics

EngineeringSilicon On InsulatorPlasma ProcessingIon ImplantationCorrosion +16

Spatial Variation of Negative Oxygen Ion Energy Distribution in RF Magnetron Plasma with Oxide Target

Tatsuo Ishijima, Kazuya Goto, Norikazu Ohshima, +2

Japanese Journal of Applied Physics

Electrical EngineeringEngineeringPhysicsEnergy AnalyzerMass Analyzer +12

The impacts of fabrication error in Si wire-waveguides on spectral variation of coupled resonator optical waveguides

Tsuyoshi Horikawa, Daisuke Shimura, Seok–Hwan Jeong, +3

Microelectronic Engineering

PhotonicsWaveguidesSpectral VariationEngineeringOptical Properties +9

Fine Structure of O^-Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism

Hirotaka Toyoda, Kazuya Goto, Tatsuo Ishijima, +3

Applied Physics Express

MagnetismElectrical EngineeringEngineeringPhysicsApplied Physics +12