Concepedia

P. Argits

PA

Statistics

Publications

1

Citations

16

H-Index

1

Active since

1996

Affiliations

National Centre of Scientific Research "Demokritos"(Current)

P. Argits is an author at National Centre of Scientific Research "Demokritos" specializing in energy deposition, physical chemistry, and electronic material characterization.

Publications per year

1996–1996

1

Publications

1

Determination of acid diffusion and energy deposition parameters by point e-beam exposure in chemically amplified resists

I. Raptis, L. Grella, P. Argits et al. · Microelectronic Engineering · 1996 · 16 citations

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