Concepedia

A. A. Orlikovsky

AA

9

Publications

198

Citations

9

H-Index

1991

Active since

Affiliations

Institute of Physics and Technology(Current)

Russian Academy of Sciences

Moscow Institute of Physics and Technology

A. A. Orlikovsky is an author at Institute of Physics and Technology specializing in applied physics, engineering, and nanotechnology.

Top concepts

EngineeringApplied PhysicsNanotechnologyMicroelectronicsInstrumentationNanoelectronicsElectrical EngineeringPhysicsMicroscopyNanomaterials

Publications per year

1991–2013

9

Publications

9

International Conference on Micro- and Nano-Electronics 2009

Kamil A. Valiev, A. A. Orlikovsky · Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series · 2010 · 34 citations

Electrical Engineering, Nanoscale System, Engineering +6

Tunnel field-effect transistors with graphene channels

Dmitry Svintsov, V. Vyurkov, A. A. Orlikovsky et al. · Semiconductors · 2013 · 31 citations

Measurement of dimensions of resist mask elements below 100 nm with help of a scanning electron microscope

V. A. Kal’nov, Yu. A. Novikov, A. A. Orlikovsky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 31 citations

Engineering, Electron-beam Lithography, Microscopy +17

Studies of nanoscale structure and its transformation in pulsed-laser deposited dense diamond-like carbon films

V.N. Apakina, M.S. Kogan, A. Kvit et al. · Diamond and Related Materials · 1997 · 26 citations

Materials Science, Diamond-like Carbon, Engineering +8

Plasma etching of poly-Si/SiO2/Si structures: Langmuir-probe and optical-emission-spectroscopy monitoring

K. V. Rudenko, A. V. Myakon’kikh, A. A. Orlikovsky · Russian Microelectronics · 2007 · 18 citations

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